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The Role of Microscopy in Semiconductor Failure Analysis
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Bibliographic Detail
Publisher Gordon & Breach Science Pub
Publication date August 1, 1992
Binding Paperback
Book category Adult Non-Fiction
ISBN-13 9780198564324
ISBN-10 0198564325
Availability§ Out of Print
Published in Great Britain
Original list price $29.95
Other format details sci/tech
§As reported by publisher
Summaries and Reviews
Amazon.com description: Product Description: Microscopy is central to the vast majority of semiconductor failure analyses, and is therefore of great importance to engineers concerned with design validation, process optimization, component qualification, testing, and pre- or post-use diagnostics. A wide range of microscopical techniques is available, and each has a unique and complementary role to play in determining the causes of semiconductor failure. The applications of microscopy to semiconductor failure analysis are described in this concise handbook, which provides a valuable practical guide for all those working in the field. The basic principles and operation of each type of microscopy are explained, and each is illustrated with case histories and micrographs of many failure mechanisms. The need for new microscopies for the study of future generation devices is discussed, and several possible candidates for this purpose are assessed.

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Paperback
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from Gordon & Breach Science Pub (August 1, 1992)
9780198564324 | details & prices | List price $29.95
About: Microscopy is central to the vast majority of semiconductor failure analyses, and is therefore of great importance to engineers concerned with design validation, process optimization, component qualification, testing, and pre- or post-use diagnostics.

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