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Handbook of Silicon Based MEMS Materials and Technologies
cover image for 9780323299657
Product Description: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS...read more
By Teruaki Motooka (editor)
See complete details on each edition (2 editions listed)

Hardcover:

9780323299657 | 2 edition (William Andrew Pub, September 22, 2015), cover price $275.00 | About this edition: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.
9780815515944 | William Andrew Pub, January 12, 2010, cover price $290.00 | About this edition: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.

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