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Handbook of Silicon Based MEMS Materials and Technologies
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Hardcover
Book cover for 9780323299657 Book cover for 9780815515944
 
With Mervi Paulasto-krockel (other contributor), Markku Tilli (other contributor), Sami Franssila (other contributor), Veli-matti Airaksinen (other contributor) | 2 edition from William Andrew Pub (September 22, 2015)
9780323299657 | details & prices | 824 pages | 8.75 × 11.50 × 2.50 in. | 5.40 lbs | List price $275.00
About: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.
With Ari Lehto (other contributor), Markku Tilli (other contributor), Veikko Lindroos (other contributor) | from William Andrew Pub (January 12, 2010)
9780815515944 | details & prices | 636 pages | 8.75 × 11.25 × 1.25 in. | 3.80 lbs | List price $290.00
About: A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications.