Product Description: Use of polymers is widespread in the electronics industry, both in manufacturing integrated circuits and as components in the completed devices. In addition to providing an update in conventional microlithography technology, Micro- and Nanopatterning Polymers describes new patterning techniques involving block copolymers, direct deposition of metal oxides and other materials, and image-wise chemical deposition...read more (view table of contents, read Amazon.com's description)

Product Description: Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes...read more

Product Description: This volume examines the role polymeric materials play in the electronics industry, with special emphasis on recent advances in the science and technology of resist materials and processing for microlithography. It provides the reader with an appreciation for the diversity of chemical research efforts that are required for the development of new resist materials and processes...read more

Product Description: This timely volume provides a review of fundamental radiation chemical processes and their relationship to several high technology industries. It demonstrates the significance of polymer radiation chemistry in industries such as electronics, aerospace, and optical recording...read more