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Cover for 9781107413214 Cover for 9781461467823 Cover for 9781558995130 Cover for 9780819434739
cover image for 9781107413214
Product Description: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films...read more
By Eric Peeters (editor)

Paperback:

9781107413214 | Cambridge Univ Pr, June 5, 2014, cover price $33.00 | About this edition: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale.

cover image for 9781558995130
Product Description: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films...read more (view table of contents, read Amazon.com's description)
By Maarten P. De Boer (editor), A. H. Heuer (editor), S. Joshua Jacobs (editor) and Eric Peeters (editor)

Hardcover:

9781558995130 | Materials Research Society, October 1, 2000, cover price $39.99 | About this edition: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale.

By Oliver Paul (editor) and Eric Peeters (editor)

Paperback:

9780819438324 | Society of Photo Optical, August 15, 2000, cover price $70.00

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