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Eric Peeters has written 5 work(s)
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Product Description: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films...read more
Paperback:
9781107413214 | Cambridge Univ Pr, June 5, 2014, cover price $33.00 | About this edition: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale.
Hardcover:
9781461467823 | Springer Verlag, April 20, 2013, cover price $139.00
Product Description: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films...read more (view table of contents, read Amazon.com's description)
Hardcover:
9781558995130 | Materials Research Society, October 1, 2000, cover price $39.99 | About this edition: Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale.
Paperback:
9780819438324 | Society of Photo Optical, August 15, 2000, cover price $70.00
(view table of contents)
Paperback:
9780819434739 | Society of Photo Optical, August 1, 1999, cover price $80.00
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