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Product Description: Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments...read more
By J. Lorenz (editor)

Hardcover:

9783211827413 | Springer Verlag, August 30, 2001, cover price $99.00 | About this edition: Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments.

Paperback:

9783709174302 | Springer Verlag, October 6, 2011, cover price $99.00 | About this edition: Whereas two-dimensional semiconductor process simulation has achieved a certain degree of maturity, three-dimensional process simulation is a newly emerging field in which most efforts are dedicated to necessary basic developments.

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