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Materials and Failures in Mems and Nems
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Hardcover
With Atul Tiwari (other contributor) |
from Wiley-Scrivener (October 5, 2015)
9781119083603 | details & prices | 406 pages | 7.00 × 9.00 × 1.00 in. | 1.00 lbs | List price $195.00
About: The fabrication of MEMS has been predominately achieved by etching the polysilicon material.
About: The fabrication of MEMS has been predominately achieved by etching the polysilicon material.