search for books and compare prices
Tables of Contents for Microactuators
Chapter/Section Title
Page #
Page Count
Chapter 1 Actuator Performance and Preliminaries
1
36
1.1 Introduction
1
2
1.2 Performance Measures
3
7
1.3 Actuation Means, Actuator Shells and Figure of Merit
10
9
1.3.1 Deformable Shells
11
1
1.3.2 Elastic Constants of Micromachined Structures
11
1
1.3.3 Microcantilever Beams
12
2
1.3.4 Microbridges
14
1
1.3.5 Diaphragms
15
1
1.3.6 Torsional Mirrors
16
2
1.3.7 Pivoted/Rotational Shells
18
1
1.3.8 Figure of Merit
19
1
1.4 Microfabrication Methods
19
8
1.4.1 Common Fabrication Steps
19
5
1.4.2 Bulk Micromachining
24
2
1.4.3 Surface Micromachining
26
1
1.5 Microfabrication of Specific Devices
27
6
1.5.1 Variable Capacitance Micromotor (VCM)
28
1
1.5.2 Microcantilever Beam with Piezoelectric Actuator
29
2
1.5.3 Flip-up Free-space Fresnel Microlenses
31
1
1.5.4 LIGA
32
1
1.6 References
33
4
Chapter 2 Electrical Microactuators
37
58
2.1 Introduction
37
1
2.2 Electrostatic Microactuators
38
19
2.2.1 Perpendicular Motion
39
2
2.2.2 Lateral Motion
41
1
2.2.3 Dielectric Slab
42
1
2.2.4 Combination Perpendicular and Parallel Motions
43
2
2.2.5 General Formulation
45
1
2.2.6 Linear Electrostatic Micromotors
46
3
2.2.7 Rotary Electrostatic Micromotors
49
5
2.2.8 Resonant Structures: Comb-Drives
54
1
2.2.9 Electro-Hydrodynamic Actuators
55
2
2.3 Piezoelectric Actuators
57
8
2.3.1 Linear Micromotors
62
1
2.3.2 Rotational Micromotors
63
2
2.3.3 Piezoelectric Resonant Structures
65
1
2.4 Electro-Rheological Actuators
65
2
2.5 Applications in Optics
67
11
2.5.1 Free-Space Optics
67
6
2.5.2 Integrated Optics
73
5
2.6 Applications in Acoustics and Ultrasonics
78
1
2.7 Applications in Fluidics
79
1
2.8 Applications in Relays
80
1
2.9 Applications in Scanning Probes and Microrobotics
81
4
2.10 Applications in Surgery
85
1
2.11 References
86
9
Chapter 3 Magnetic Microactuators
95
32
3.1 Introduction
95
2
3.2 Magnetic Materials for Microactuators
97
8
3.2.1 Diamagnetism
98
1
3.2.2 Paramagnetism
98
1
3.2.3 Ferromagnetism and Ferromagnets
99
3
3.2.4 Antiferromagnetism
102
1
3.2.5 Ferrimagnetism
102
1
3.2.6 Magnetostriction
102
1
3.2.7 Magnetoresistivity
103
1
3.2.8 Molecular and Polymeric Magnets
104
1
3.3 Force Laws
105
4
3.4 Magnetization-Type Microactuators
109
9
3.4.1 Thermo-Magnetic Microactuators
109
2
3.4.2 Magnetostatic Microactuators
111
4
3.4.3 Design of Magnetic Microactuators with Planar Coils
115
1
3.4.4 Electromagnetic Microactuators
116
2
3.5 Lorentz Force Actuator
118
2
3.6 Magnetostrictive Microactuators
120
2
3.7 Magnetic Levitation
122
1
3.8 Fabrication of Magnetic Actuators
123
1
3.9 References
124
3
Chapter 4 Thermal and Phase-Transformation Microactuators
127
24
4.1 Introduction
127
6
4.2 Gas Expansion
133
5
4.2.1 Thermopneumatic Micropump
134
2
4.2.2 Thermal Inkjet Printhead
136
1
4.2.3 Stirling Microengines
136
1
4.2.4 Power MEMS and Microengines
137
1
4.3 Solid Expansion
138
4
4.4 Phase Transformation Microengines and Actuators
142
6
4.4.1 Shape Memory Alloy
142
4
4.4.2 Other Phase Transformation Actuators
146
2
4.5 References
148
3
Chapter 5 Optical Microactuators
151
28
5.1 Introduction
151
1
5.2 Electron-mediated Direct Optical Actuators
152
12
5.2.1 Photoelectron Microactuator
152
5
5.2.2 Photoconductivity Modulation Actuator
157
3
5.2.3 Photodiode Microactuator
160
2
5.2.4 Optically-modulated Gas Permittivity Microactuator
162
1
5.2.5 Comparison of Direct Optical Microactuators
162
2
5.3 Direct Optical Manipulation: Optical Twizers and Traps
164
1
5.4 Opto-Thermal Actuators: Gas Expansion
165
4
5.5 All-Optical Systems
169
1
5.6 Fabrication Methods
170
6
5.6.1 Waveguide Formation
170
5
5.6.2 Anti-resonant Reflecting Optical Waveguides
175
1
5.7 References
176
3
Chapter 6 Mechanical and Acoustic Microactuators and Micropumps
179
18
6.1 Introduction
179
1
6.2 Solid Links and Other Mechanism
179
5
6.2.1 Deformable Links and Levers
180
2
6.2.2 Gear Boxes
182
1
6.2.3 Bistable Diaphragms and Structures
183
1
6.3 Ultrasonic and Acoustic Microactuators
184
9
6.3.1 Ultrasonic Microcutter
184
1
6.3.2 Bulk Acoustic Wave Pumps
185
2
6.3.3 Inkjets
187
1
6.3.4 Bulk Acoustic Wave Pumps
188
1
6.3.5 Flexural and Lamb Wave Actuators and Pumps
188
1
6.3.6 Surface Acoustic Wave Actuators and Pumps
189
4
6.4 Fluidic Switches and Amplifiers
193
1
6.5 References
194
3
Chapter 7 Chemical and Biological Microactuators
197
22
7.1 Introduction
197
1
7.2 Conversion of Chemical Reactions to Electrical and Mechanical Energies
197
5
7.2.1 Operation of Batteries
197
1
7.2.2 Chemical Reactions in Microactuators
198
2
7.2.3 Chemical Reactions in Living Organisms
200
2
7.2.3 Chemical Reactions in Man-made Engines
202
1
7.3 Biological Actuators: Muscle and Locomotion
202
8
7.3.1 Locomotion and Mechanical Work in Biological Systems
202
2
7.3.2 Different Types of Muscle
204
1
7.3.3 Skeletal Muscle Structure and Work Cycle
205
5
7.4 Chemical Jet in Beetles
210
3
7.4.1 Squirting Action
211
1
7.4.2 Surfactant Swimming
212
1
7.4.3 Explosive Jets
213
1
7.5 Combustion Engine: MEMS Microengines
213
1
7.6 Conducting Polymer Actuators
214
1
7.7 Gels
214
3
7.8 References
217
2
Chapter 8 Smart Structures
219
60
8.1 Introduction
219
2
8.2 Sensors
221
1
8.3 Physical Sensors
222
19
8.3.1 Electrical Sensing Means
223
8
8.3.2 Magnetic Field Methods
231
1
8.3.3 Optical Methods
232
9
8.4 Chemical Sensors
241
17
8.4.1 Electrical Gas and Chemical Sensors
243
3
8.4.2 Guided-Optics Intrinsic Chemical Sensors
246
4
8.4.3 Extrinsic Chemical Sensors
250
1
8.4.4 Polymer Waveguide Chemical Sensors
251
1
8.4.5 Surface Plasmon Chemical Sensors
252
1
8.4.6 Indicator-Mediated Extrinsic Sensing
253
3
8.4.7 Optical Biosensors
256
1
8.4.8 Ultrasonic Gas and Chemical Sensors
257
1
8.4.9 Intelligent Sensors
258
1
8.5 Connections/Links and Wiring
258
5
8.5.1 Optical Links
260
2
8.5.2 Requirement on the Processing Unit/Intelligence
262
1
8.6 Actuators
263
1
8.7 Signal Processing/Computing
264
10
8.7.1 Implicit Computation
266
1
8.7.2 Explicit Computation
267
7
8.8 References
274
5
Subject Index
279