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Introductory Mems: Fabrication and Applications
By Richard A. Layton
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Paperback
Book cover for 9781489984210
 
With Thomas M. Adams | from Springer Verlag (September 7, 2014)
9781489984210 | details & prices | 462 pages | List price $99.00
About: This is a practical introduction to MEMS for advanced undergraduate and graduate students.