Preface

Mechanisms

Essential Aspects of Chemical Mechanical Planarization for Oxide Semiconductor

H. Hocheng

H.Y. Tsai

Y.L. Huang

A Novel Chemical-Mechanical Planarization Technology Using Pre-Thin-Surface Grinding in ULSI Manufacturing Process

J. Watanabe

R. Etoh

M. Hirano

Some Essentials of Simulating Nano-Surfacing Processes Using the Molecular Dynamics Method

W.C.D. Cheong

L. Zhang

H. Tanaka

Assessment of the Exit Defects in Carbon Fibre-Reinforced Plastic Plates Caused by Drilling

H. Zhang

W. Chen

D. Chen

L. Zhang

Grinding of Ceramics: Strength, Surface Features and Grinding Conditions

T. Liu

B.A. Latella

L. Zhang

Grinding Burn Mechanism of Directionally Solidified Superalloy

M. Chen

F. Sun

B. Xue

Friction and Wear

Wear Mechanism of Diamond Cutting Tool in Machining of Steel

H. Tanaka

S. Shimada

N. Ikawa

M. Yoshinaga

A Friction Model for Free-Machining Steels and Its Applicability to Machinability Analysis

K. Maekawa

A. Kubo

T.H.C. Childs

Improvement of Friction and Wear Properties of CVD-SiC Films with New Surface Finishing Method `ELID-Grinding'

T. Kato

H. Ohmori

C. Zhang

T. Yamazaki

Y. Akune

K. Hokkirigawa

Methods and Tools

A New Device of Abrasive Jet Machining and Application to Abrasive Jet Printer

T. Kuriyagawa

T. Sakuyama

K. Syoji

H. Onodera

On-Machine Monitoring of the Wheel-Working Surface Condition with the Relative Frequency Distribution of its Profile

S. Shimizu

H. Sakamoto

On-Machine Monitoring of the Wheel Working Surface Condition with the Fractal Dimension Analysis of Its Profile

H. Sakamoto

S. Shimizu

Fabrication of Metal-Bonded Grinding/Polishing Tools by Greentape Laser Sintering Method

K. Maekawa

Y. Yokoyama

I. Ohshima

Abrasive Capacity of Thin Film Diamond Structures

J. Andersson

P. Hollman

S. Jacobson

Micro Hole Machining of Borosilicate Glass through Electrochemical Discharge Machining (ECDM)

C.T. Yang

S.S. Ho

B.H. Yan

Micro-Spherical Lens Mold Fabrication by Cup-Type Metal-Bond Grinding Wheels Applying ELID (Electrolytic In-Process Dressing)

T. Matsuzawa

H. Ohmori

C. Zhang

W. Li

Y. Yamagata

S. Moriyasu

A. Makinouchi

Threading of Inclusion Modified Steels with Coated Carbide Tools

E.O. Ezugwu

C.I. Okeke

CVD Diamond Coating Technologies and Application in Cutting Abrasive Materials

M. Chen

F. Sun

Z. Zhang

Author Index

Keyword Index