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Ajay Kumar has written 8 work(s)
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Hardcover:
9780471131946 | Wiley-Interscience, December 1, 2002, cover price $89.95
Paperback:
9788122305357 | Gardners Books, December 30, 2004, cover price $4.65
Product Description: A valuable resource book for plant operations, and human relations managers, this text discusses how successful companies develop meeting and communication areas, communicate work standard production controls and make goals and progress visible...read more
Hardcover:
9788190721110 | Coronet Books Inc, December 5, 2008, cover price $57.50 | About this edition: A valuable resource book for plant operations, and human relations managers, this text discusses how successful companies develop meeting and communication areas, communicate work standard production controls and make goals and progress visible.
Master Extreme Ultraviolet Lithography TechniquesProduce high-density, ultrafast microchips using the latest EUVL methods. Written by industry experts, Extreme Ultraviolet Lithography details the equipment, materials, and procedures required to radically extend fabrication capabilities to wavelengths of 32 nanometers and below. Work with masks and resists, configure high-reflectivity mirrors, overcome power and thermal challenges, enhance resolution, and minimize wasted energy. You will also learn how to use Mo/Si deposition technology, fine-tune performance, and optimize cost of ownership. Design EUVL-ready photomasks, resist layers, and source-collector modulesAssemble optical components, mirrors, microsteppers, and scannersHarness laser-produced and discharge pulse plasma sourcesEnhance resolution using proximity correction and phase-shift Generate modified illumination using holographic elementsMeasure critical dimensions using metrology and scatterometry Deploy stable Mo/Si coatings and high-sensitivity multilayersHandle mask defects, layer imperfections, and thermal instabilities
Hardcover:
9783527408184 | Vch Pub, May 30, 2010, cover price $120.95
9780071549189 | McGraw-Hill Professional Pub, April 3, 2009, cover price $146.00 | About this edition: Master Extreme Ultraviolet Lithography TechniquesProduce high-density, ultrafast microchips using the latest EUVL methods.
Paperback:
9783642125942 | Springer-Verlag New York Inc, June 7, 2010, cover price $99.00
Paperback:
9780821384565 | World Bank, March 11, 2011, cover price $35.00
Paperback:
9789401044561 | Reprint edition (Springer Verlag, November 5, 2012), cover price $579.00
Paperback:
9788132226246 | Springer-Verlag New York Inc, October 12, 2015, cover price $199.00
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