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H. Baltes has written 2 work(s)
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CMOS Cantilever Sensor Systems: Atomic-Force Microscopy and Gas Sensing Applications
cover image for 9783642077289
Product Description: This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype...read more
By H. Baltes, O. Brand and D. Lange
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Paperback:

9783642077289 | Springer Verlag, November 1, 2002, cover price $189.00 | About this edition: This book is intended for scientists and engineers in the field of micro- and nano­ electro-mechanical systems (MEMS and NEMS) and introduces the development of cantilever-based sensor systems using CMOS-compatible micromachining from the design concepts and simulations to the prototype.

Cmos Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications
cover image for 9783540431435
By H. Baltes, Oliver Brand and D. Lange
See complete details on each edition (1 edition listed)

Hardcover:

9783540431435 | Springer Verlag, November 1, 2002, cover price $189.00

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