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Metrology, Inspection & Process Control for Microlithography XI: 10-12 March 1997 Santa Clara, California
By
Susan K. Jones (editor)
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Bibliographic Detail
Publisher
Society of Photo Optical
Publication date
July 1, 1997
Binding
Paperback
Book category
Adult Non-Fiction
ISBN-13
9780819424648
ISBN-10
0819424641
Dimensions
1.25 by 8.25 by 10.75 in.
Weight
3.30 lbs.
Availability§
Out of Print
Original list price
$89.00
Other format details
sci/tech
§As reported by publisher
Summaries and Reviews
Editions
Paperback
The price comparison is for this edition
from Society of Photo Optical (July 1, 1997)
9780819424648 | details & prices | 8.25 × 10.75 × 1.25 in. | 3.30 lbs | List price $89.00
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